Hitachi High-Technologies introduces New Regulus Series of FE-SEM
Hitachi High-Technologies Corporation revealed the introduction of the new Regulus series of Field Emission Scanning Electron Microscopes (FE-SEM) on May 30. As a new brand for FE-SEMs, the Regulus series lineup comprises four models: the Regulus8100, developed as the successor to the SU8010, as well as the Regulus8220, Regulus8230, and Regulus8240, which extend the functions of the SU8200 series with the use of a common platform. The Regulus series offers enhanced functionality with improved resolution and operability.
- Cold field emission (CFE) gun optimised for low-voltage, high-resolution imaging with low aberration
- Resolution improved by20% than previous models
(Regulus8220/8230/8240: 0.9 nm/1 kV; Regulus8100: 1.1 nm/1 kV)
- Maximum magnification doubled from 1 million times to 2 million times*1(Only in Regulus8240/8230/8220)
- User-support functions to ensure high performance